High Throughput, Flexible Multi-Chamber Rapid Thermal Processing Production System

The MODULAR One™ , a reliable high throughput production RTP system with up to 3 chambers, includes an advanced gas handling system, with dynamic, and realtime multi-zone temperature control. The MODULAR One™ RTP system defines superior process performance for critical ULSI process requirements and supports an impressive list of processes. AGV and SMIF are available. Processes are defined and controlled by software having unique features. The system includes extensive safety features and on-line CD-ROM documentation for easy maintenance.

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