Modular Process Technology is a semiconductor equipment manufacturer of Rapid Thermal Processing Systems, hybrid UV-RTP  systems, and stand alone UV Ozone Cleaning Systems. There are many unique features incorporated into our product lines which make our products attractive to advanced research and development and manufacturing. Modular Process Technology has in-depth experience in fundamental materials science research and process development. Our extensive process technology is reflected in the quality of our system design and integration.
We invite you to tour our web site to learn about the products we offer. Use our feedback page if you have any comments or have questions about our products.


Our Mission

Modular Process Technology is committed to creating the highest quality, most advanced, and most reliable process equipment and forging strategic partnerships with leading semiconductor manufacturers. Our goal is complete customer satisfaction through service and support excellence.